Ultra High-Purity SS316 VCR Thread Pneumatic Diaphragm Valve for Semiconductor 6n

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Product Description

Basic Information

Model NO.
WV4
Actuator
Pneumatic
Connection
Male Thread VCR Connector
Material
Stainless Steel
Structure
Global Diaphragm Valve
Pressure
Low Pressure
Flow Direction
Left Input, Right Output
Function
Shut off
Standard
GB, ANSI
Port Size
1/4"
Surface Roughness
Ep-Grade Ra0.13um
Working Pressure
150psig (10bar)

Packaging & Delivery

Package Size
15.00cm * 15.00cm * 15.00cm
Gross Weight
1.500kg

Export Packaging Standard: Double-layer plastic bag, vacuum inside, plastic packaging outside + white carton + cardboard box.

Technical Specification

Port Dimension1/4'' , 3/8''
Flow CoefficientCv=0.27
Internal Diameter (ID)0.16in. (4.1mm)
Maximum Working PressureManual: 20bar (300psig) | Pneumatic: 10bar (150psig)
Actuator Working Pressure4.2~6.2bar (60~90psig)
Working TemperaturePCTFE: -23~65ºC | PFA: -23~150ºC
Leakage Rate (Helium)Inside & Outside: ≤1×10^-9 mbar.l/s
Clean ProcessBA: Standard cleaning | EP: Electrolytic polishing Ra0.13μm
Pneumatic Diaphragm Valve Dimensions
Pneumatic Diaphragm Valve Technical Drawing
Ultra High-Purity Valve Structure

Key Features

Metal to metal seal provides leak-free service in vacuum to high pressure range.
Small internal volume for complete purging of the flow path.
Fully wrapped seat design with superior anti-expansion capabilities.
Nickel-cobalt alloy diaphragm for higher durability and corrosion resistance.
Standard roughness Ra0.25μm (BA) or electrolytically polished Ra0.13μm (EP).
Pneumatic valve life tested up to 3 million cycles.
Pneumatic Actuator Diagram

Detailed Photos

Valve Close up 1
Valve Close up 2

Certifications

ISO Certification
CE Certification

Manufacturing Excellence

Clean Room Assembly
Production Line
Testing Facility
Quality Control
Warehouse

Frequently Asked Questions

What are the available payment methods?
We accept T/T, Western Union, Paypal, credit cards, and trade assurance.
What is the Minimum Order Quantity (MOQ)?
Most products are in stock with an MOQ of 1 piece. We can accommodate various quantity requirements.
Which certifications do the products hold?
Our products are certified with ISO9001, CE, and RoHS.
What is the standard delivery time?
Typically, the delivery time is between 1 to 2 weeks.
Are all goods tested before delivery?
Yes, 100% of products pass pressure and helium leak detection tests (leakage rate ≤10^-9 mbar.l/s).
What materials are used for the valve body and diaphragm?
The body uses SEMI standard 316L (VAR or VIM-VAR optional), and diaphragms are made from Hastelloy or nickel-cobalt alloys.

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